Thin-Film Pattern Formation & Etching
Processing techniques enabling thin-film varieties and etching patterns
Overview
We will carry out pattern formation processing on all metallic and ITO films for each substrate variety (Polyimide, PET, PEN, etc.), glass, and silicon substrate.
By combining the thin-film coating technology we've accumulated with etching techniques, we can create thin films in a wide variety of forms and etching patterns, including those previously unimaginable.
By making fine adjustments to the conditions of coating and pattern formation, we have coated and created patterns on substrates as thin as 7.5 μm.
We are able to handle the coating, even only patterning and lift off processes.
Features & Strengths
Point1 A diverse range of film forms and etching patterns
Point2 Consistency of film coating and pattern formation during manufacturing
Point3 We have coated and created patterns on substrates as thin as 7.5 μm
Point4 Processing with pattern formation only also available
Applications

Self detection kit
Self detection kits that are useful for in-house medical and healthcare
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Specifications
Processing examples
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PET Film/Cu(L:5μm) -
Example of pattern processing with aluminum alloy laminated film (Image from observation of SEM cross section)
Pattern formation processing specifications
Substrate materials | Glass, silicon wafer, and many varieties of film |
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Work size *1 | 10 x 10 mm - 210 x 210 mm, up to 8 inchesφ |
Minimum L/S *2 | 8/8μm |
Target materials *3 | ITO, Al, Al alloys, Ag, Au, APC, Cr, Cu, Cu alloys, Ni, Ni alloys, Mo, Mo alloys, FTO, etc. |
*1Please consult with us regarding irregular shapes or other sizes.
*2The performance of the thin-film material ITO processing (150nm film thickness).
*3We have achieved 5/5μm L/S in some thin-film materials. Please note there are some conditions we are not able to offer the solutions, depending on thin-film material, film thickness and composition.
We can explore specifications other than those above. Please consult with us first.
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Detailed specifications and data
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