Thin-Film Pattern Formation & Etching

Processing techniques enabling thin-film varieties and etching patterns

Overview

We will carry out pattern formation processing on all metallic and ITO films for each substrate variety (Polyimide, PET, PEN, etc.), glass, and silicon substrate.
By combining the thin-film coating technology we've accumulated with etching techniques, we can create thin films in a wide variety of forms and etching patterns, including those previously unimaginable.
By making fine adjustments to the conditions of coating and pattern formation, we have coated and created patterns on substrates as thin as 7.5 μm.
We are able to handle the coating, even only patterning and lift off processes.

Features & Strengths

Point1 A diverse range of film forms and etching patterns

Point2 Consistency of film coating and pattern formation during manufacturing

Point3 We have coated and created patterns on substrates as thin as 7.5 μm

Point4 Processing with pattern formation only also available

Applications


Self detection kit

Self detection kits that are useful for in-house medical and healthcare

View more applications

Specifications

Processing examples

  • PET Film/Cu(L:5μm)
  • Example of pattern processing with aluminum alloy laminated film (Image from observation of SEM cross section)

Pattern formation processing specifications

Substrate materials Glass, silicon wafer, and many varieties of film
Work size *1 10 x 10 mm - 210 x 210 mm, up to 8 inchesφ
Minimum L/S *2 8/8μm
Target materials *3 ITO, Al, Al alloys, Ag, Au, APC, Cr, Cu, Cu alloys, Ni, Ni alloys, Mo, Mo alloys, FTO, etc.

*1Please consult with us regarding irregular shapes or other sizes.

*2The performance of the thin-film material ITO processing (150nm film thickness).

*3We have achieved 5/5μm L/S in some thin-film materials. Please note there are some conditions we are not able to offer the solutions, depending on thin-film material, film thickness and composition.

We can explore specifications other than those above. Please consult with us first.

Contact us-to-Delivery Process

When outsourcing of thin-film coatings to substrates provided by customers

When outsourcing of substrate material procurement and post coating process, in addition to thin-film coating

Inquiries & Requests for Materials

Please feel free to contact us for more details.

  • Detailed specifications and data
  • Prices and Quotes
  • Delivery Confirmation
  • Customization
  • Sample and Prototype Production
  • Other
Contact Us

Small Lots & Samples

Small lots and sample items can be purchased via the online store.

Online Store

Products & Solutions

Related Information